Valletta, Malta - May 28th - 31st, 2023 |
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Sunday, May 28th
18:00 – 19:30 Welcome, committees meeting for final organization setup and last minute adjustments.
Monday, May 29th
9:30 – 10:30 Starting
plenary session
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Emile MARTINCIC / Russell FARRUGIA / Owen CASHA |
Welcome address |
| Invited talk: Roseanne Duca (STMicroelectronics) | From Theory to Reality: Package Modeling in a Smarter World |
10:30 – 11:15 : Pause / coffee-tea break
Chairperson: Owen CASHA (Univ. Malta, Malta)
| Dooyoung HAH | Symmetric electret-based vibration energy harvesters with curved-beam hinges |
| Hiroaki HONMA, Yukiya TOHYAMA, HIROSHI TOSHIYOSHI | Bandwidth Extension for MEMS Vibrational Energy Harvester using High-Voltage Electret |
12:15 – 13:45 : Lunch pause
13:45 – 14:45 : RF devices
Chairperson: Alina CISMARU (IMT, Romania)
| Romolo MARCELLI, Giovanni CAPOCCIA, Giovanni Maria SARDI, Giancarlo BARTOLUCCI, Jacopo IANNACCI, Girolamo TAGLIAPIETRA, Flavio GIACOMOZZI, Benno MARGESIN | RF MEMS switched K-Band Sierpinski resonators |
| Munira BENGASHIER, Ivan GRECH, Owen CASHA, Russell FARRUGIA, Barnaby PORTELLI | Mechanical Contact Type RF-MEMS Switches for Micro- wave band Applications |
| Massinissa NABET, Martin RACK, Benjamin HUET, Romain TUYAERTS, Gilles SCHEEN, Ling Yan ZHANG , Arthur EMIEL, Clement DORION, Pierre BLONDY, Romain STEFANINI, Jean-Pierre RASKIN | High Resistivity Trap-Rich Substrate for RF MEMS Switches |
15:15 – 16:45 : 5 min Poster presentations + poster session
Chairperson: Hiroshi TOSHIYOSHI (Univ. Tokyo, Japan)
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Poster session Monday 29th |
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| Elemér DEáK, Balázs PLESZ, Péter SZABó | Design and simulation of a resonant thermomechanic actuator for large displacements | |
| Barnaby PORTELLI, Ivan GRECH, Joseph MICALLEF, Russell FARRUGIA, Owen CASHA, Edward GATT | Implementation of an all-digital electrostatic resonating micro-mirror controller | |
| Thomas SCIBERRAS, Marija DEMICOLI, Ivan GRECH, Bertram MALLIA, Pierluigi MOLLICONE, Nicholas SAMMUT | MEMS Electrothermal Actuators for Underwater Manipulation and Mechanical Characterisation of Human RED Blood Cells | |
| Alina CISMARU, Martino ALDRIGO, Sergiu IORDANESCU, Mircea DRAGOMAN, Catalin PARVULESCU, Damir MLADENOVIC | Miniaturization of microwave antennas through metamaterials with enhanced radiation performance | |
| Sylvie BILENT, Philippe COSTE, Emile MARTINCIC, Pierre-Yves JOUBERT | PDMS based capacitive flexible sensors sensitivity to ambient conditions | |
Tuesday, May 30th morning - MIP room
9:00 – 9:30 Welcome
9:30 – 10:30 : Packaging and space applications
Chairperson: Peter SCHNEIDER (Fraunhofer, Germany)
| Martina ZANETTI, Jean-Louis LECLERCQ, Philippe REGRENY, Alexandre DANESCU, Maxime DARNON, Gwenaëlle HAMON | Low temperature joining of semiconductor substrates/thin layer on solid and flexible wafers by solid-liquid inter-diffusion bonding using low thickness Ni-Sn system |
| Sylvain LEMETTRE, Clément BESSOUET, Charlotte KUTYLA, Alain BOSSEBOEUF, Philippe COSTE, Thierry SAUVAGE, Hélène LECOQ, Olivier WENDLING, Aurélien BELLAMY, Johan MOULIN | Zr-V getter films for MEMS packaging |
| Frederic ZAMKOTSIAN, Patrick LANZONI, Rudy BARETTE, Yves PETREMAND, Sylwester BARGIEL |
MOEMS for space applications: design, realization and characterization |
10:30 – 11:00 : Pause / coffee-break
11:00 – 12:00 : MEMS Sensors
Chairperson: Alain BOSSEBOEUF (CNRS / Univ. Paris-Saclay, France)
| Simon ESSING, Tobias MITTEREDER, David TUMPOLD, Gabriele SCHRAG | PREDICTIVE MODELLING OF EMITTER SYSTEMS IN PHOTOACOUSTIC GAS SENSING |
| Tarek SEOUDI, Julien CHARENSOL, Fanny PAGES, Wioletta TRZPIL, Roman ROUSSEAU, Diba AYACHE (IES-université de Montpellier), aurore VICET, Michael BAHRIZ | Highly sensitive capacitive MEMS for photoacoustic gas sensing |
| Valentin DIVAY, Mohamed SAADAOUI, Christian RIVERO, Pascal FORNARA, Sylvain BLAYAC | Highly sensitive force sensor featuring a MEMS-instrumented buckling lamella |
12:30 – 14:00 : Lunch pause
9:00 – 9:30 Welcome
9:30 – 10:30 : MEMS CAD and design
Chairperson: Abe ELFADEL (Khalifa University, United Arab Emirates )
| Yudai SATO, Shun YASUNAGA, Yoshio MITA, Satoshi KOMATSU | Automatic Generation System of Capacitive MEMS Accelerometers |
| Martin UNGERER, Ulrich GENGENBACH, Karanvir Singh GREWAL, Achim WENKA, Ingo SIEBER | Design-for-manufacture of a dual-chamber nozzle for hydrodynamic focusing of the aerosol-on-demand jet-print head |
| Wail AL-MOGAHED, Sebastian VOIGT, Philipp MEHNER, Georgi PASCHEW, Andreas RICHTER, Jan MEHNER | Laser Structured Silicon Based Multi Fourier Horn Resonator |
10:30 – 11:00 : Pause / coffee break
11:00 – 12:00 : MEMS Modelling
Chairperson: Jose GARCIA SOUTO (Univ Carlos III, Spain)
| Cécile PERNIN, Gérard SCORLETTI, Anton KORNIIENKO, Guillaume PAPIN |
MEMS Gyro Mechanical Coupling Noise Contribution : Modelling and Experiments |
| Binh NGUYEN, Piotr CZARNECKI, Maja ZUNIC, Guiherme TORRI, Veronique ROCHUS | Modelling of ferroelectric micro-cantilever actuator |
| Wajih SYED, Abe ELFADEL | A Symbolic Approach to the Modelling of Tapered Beams in Piezoelectric Energy Harvesters |
12:30 – 14:00 : Lunch pause
Tuesday, May 30th afternoon
Chairperson: Romolo MARCELLI (CNR, Italy)
| Najeh ZEIDI, Martin RACK, Nicolas ANDRE, Jean-Pierre RASKIN, Fares TOUNSI, Denis FLANDRE | Effect of Silicon Substrate Resistivity on Large Area High-Voltage Spiral Inductor Performance |
| Tamara TERZIC, Nikolai ANDRIANOV, Mustapha CHOUIKI, Dmytro SOLONENKO, Annalisa DE PASTINA, Sarah RISQUEZ | Vertical etching of Al0.7Sc0.3N for next generation of acoustic wave resonators |
| Sylvie BILENT, Emile MARTINCIC, Pierre-Yves JOUBERT | Assessment of electromechanical performances of PDMS-based flexible capacitive pressure sensors |
15:00 – 15:30 : Pause / coffee break
15:30 – 17:00 : Sponsors slot + 5
min Poster presentations and poster session
Chairperson: Yves-Alain PETER (Polytechnique Montréal, Canada)
| Nikolay SMAGIN, Duquennoy MARC, Blondeau-Patissier VIRGINIE, Lionel ROUSSEAU, Valbin LAURIE, Etienne HERTH | Analysis of SAW Sensor Coated by a Biocompatible Parylen Polymer |
| Jose GARCIA-SOUTO, Cindy A. BAEZ-RIVERA, Pablo CARRILLO-AGUDO, Javier LAZARO-FERNANDEZ, Pablo ACEDO | Electronics design of piezo-resistive MEMS microphone arrays for aero-acoustics in flight tests |
| Stephen SAMMUT, Edward GATT, Ruben BORG | Modelling and experimental verification of a 350 µm diameter PMUT operating in Isopropanol. |
18:00 – 23:00 : Social event – Evening in Birgu
The group will meet a licensed tourist guide at 17:45hrs at the Valletta Campus and will walk together to the ferry terminal to catch the 18:15hrs ferry. Crossing to the Three Cities by ferry is the perfect way to appreciate the fortifications of the Grand Harbour. Upon arrival the group will enjoy a walking tour of Birgu (also known as Vittoriosa). Already an important administrative centre during Medieval times, the city served as the very first headquarters of the Knights of the Order of St John in 1530 and has remained a crucial Maritime hub till this very day. The walk will end at 19:45hrs at Cargo's Restaurant for a 3-course menu dinner. Transport back to Valletta after dinner will be provided.
9:00 – 9:30 Welcome
9:30 – 10:30 Sensors
Chairperson: Russell FARRUGIA (Univ. Malta, Malta)
| Léo CHAMARD, Alain GIANI, Julien WEISS, Philippe COMBETTE | Elaboration and study of a family of calorimetric wall Shear stress microsensors based on silicon substrate with different mechanical robustness |
| Norman LASKE, Henning HANSSEN, Artem KORMANN | Localization of Dielectric Failures in Aluminium Nitride MEMS Actuators Using Lock-in Thermography |
| Ali HOSSEINPOUR SHAFAGHI, Basit ABDUL, Rayan BAJWA, Farid Sayar IRANI, MURAT KAYA YAPICI | Soft SU-8 thermal bimorph actuators with large out-of-plane deflection |
10:30 – 11:00 :
Pause
11:00 – 12:00 MEMS sensors and actuators
Chairperson: Dooyoung HAH (Abdullah Gül University, Turkey)
| Hiroaki HONMA, Yuto MIZUNO, HIROSHI TOSHIYOSHI | Characterization of Resonance Sensor Integrated in MEMS Vibrational Energy Harvester |
| Sara GUERREIRO, Markus BAINSCHAB, Adrien PIOT, Rodrigo TUMOLIN ROCHA, HIROSHI TOSHIYOSHI, Alain BOSSEBOEUF, Takashi SASAKI, Anton LAGOSH, Moridi MOHSSEN |
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| Yoshio MITA, Shun YASUNAGA, Keigo TSUJI, Akio HIGO, Tetsuya IIZUKA, Motohiko EZAWA | "TopoMEMS varicaps'' - MEMS comb-drive variable capacitors with tailored stroke-to-capacitance dependence |
12:30 – 12:45 Closing
session
12:45 – 13:45 Lunch
13:30 – 16:30 Visit to STMicroelectronics facility for registered attendants
Departure from the UM Campus in Valletta will take place at 13:30.
The visit is scheduled from 14:15 till 16:15.
The visit will consist of the following:
1 - Introduction
2 - MEMS Front End line Tour
3 - MEMS Back End line Tour
4 - MEMS Testing line Tour
Please note that taking photographs is not allowed on site.
The following >>registration form<< (please click) needs
to be filled by each visitor.
All visitors need to present an official identification document (passport, ID card, etc) at the security desk at STMicroelectronics
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17:00 – 18 :00 DTIP commitees closing meeting
