Paris, France - May 31st - June 3rd, 2026 |
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Sunday, May 31st
18:00 – 20:00 Welcome and registration
A welcome event will offer the possibility to register and meet DTIP attendees and organizers. It will be held in the "Bouillon Racine - Bar du Bouillon", 3 Rue Racine 75006 Paris (Metro stations "Cluny - La Sorbonne" or "Odeon" or RER train station "Luxembourg")
Monday, June 1st
|
Emile MARTINCIC |
Welcome address |
|
Invited talk: Professor Ryo Shimano |
Femtosecond laser-based nonlinear THz optoelectronics with quantum materials |
10:30– 10:40 : Pause
Chairperson: Alina Cismaru (IMT, Romania)
| Vishal SAHU, Priyanka DEWANGAN, Prem PAL Deep wet bulk micromachining of Borofloat glass using low-cost Ni thin film-based masking layer | Wet
bulk micromachining is a simple and widely adopted technique for
fabricating microstructures in glass wafers due to its low cost and
straightforward setup. However, selecting an appropriate masking
material is critical because of the highly corrosive nature of
hydrofluoric acid (HF). In this study, a 500 nm nickel (Ni) thin film
combined with a positive photoresist (AZ1512HS) is employed as a
masking layer for deep wet etching of glass using 20% HF as the
etchant. The Ni thin film is deposited at 450 °C by DC magnetron
sputtering. This work investigates the feasibility of Ni thin films as
a masking material for glass wet etching. The Ni mask exhibits
excellent resistance to HF, enabling the defect-free fabrication of
deep microcavities with depths exceeding 200 µm and an isotropy ratio
of less than 1. These results confirm the effectiveness of Ni thin
films as a robust masking material for glass wet etching. The proposed
approach offers a cost-effective and reliable alternative to
conventional masking materials and demonstrates, for the first time,
the use of Ni thin films as an effective mask for wet etching of glass. |
| Kuo-Shen CHEN Fracture Characterization of Silicon Carbide/Graphite Composites for MOCVD Chamber Design | Silicon
carbide-coated graphite is usually selected as a structural material
for high temperature and corrosive applications in vapor deposition.
However, fracture or delamination of the carbide in the structure is an
urgent issue that needs to be addressed and an essential structural
integrity assessment flow for characterizing fracture toughness should
be developed. In this work, the micro indentation toughness testing
scheme proposed by Marshall and Lawn is adapted in conjunction with the
elastic modulus, as well as the residual stress, characterization of
both silicon carbides and graphite of the MOCVD structures. Finally, an
equivalent von-Mises design rule based on fracture mechanics is
proposed for structural design engineers for related equipment design. |
| Sora TSUNODA, Satoshi KOMATSU Curl Reduction in Monolithic CMOS-MEMS Accelerometers by Scaling and Arraying | In
this study, the effects of curl are mitigated through scaling and array
architecture of monolithic CMOS-MEMS accelerometers. ANSYS simulations
are used to calculate the coupling capacitance between comb fingers
based on their projected area and the effectiveness of scaling in
reducing curl is evaluated. As a result, the sensitivity of the MEMS
accelerometer increases, and the nonlinearity decreases. Scaling by
one-third increases, while the sensitivity increases by 3.22 times, and
the sensitivity reduction due to curl is suppressed to 1.35%.
Furthermore, nonlinearity is also reduced by 1.18% within a range of
±2G. This approach eliminates the need for dedicated curl compensation
structures. |
| Akihiko YOSHIDA, Ryosho NAKANE, Shun YASUNAGA, Akio HIGO, Yoshio MITA Improving MEMS Reservoir Computing Performance Using Pt-Sputtered Contact Switches |
Physical reservoir computing using micro-electro-mechanical systems (MEMS) resonators offers a promising approach to low-power sensing and computation by exploiting the complex dynamics of MEMS devices. In addition, contact-event-based representation has the potential to enable direct digital readout of reservoir states, and can reduce the need for analog-to-digital converters. In this study, to improve the stability of electrical contact, a sputtered Pt thin film was introduced. In a durability test, stable operation was observed for 100 hours, except for an initial variation period. Reservoir computing experiments were then performed for short-term memory tasks and temporal XOR tasks. Non-random performance was obtained for temporal dependencies involving inputs from up to the past 4 time steps, compared with about 1 previous time step in our previous study. These results suggest that improved contact stability, enabled here by Pt sputtering, is an important factor in the performance of contact-switch-based MEMS reservoirs. |
12:00 – 14:00 : Lunch pause
14:00 – 15:00 : Materials for MEMS
Chairperson: Ibrahim Elfadel (Khalifa University, AUE)
| Nabil ALAID, Hélène DEBEDA, Eihab ABDEL-RAHMAN, Armaghan SALEHIAN, Nadia BENCHAREF, Catherine ELISSALDE Integration of Additively Manufactured Cellular Steel Beams with Screen-Printed Thick-Film PZT for Low-Frequency Energy Harvesting |
Additive
manufacturing is employed to develop a vibration energy harvester based
on a fully triangular cellular stainless steel beam. The substrate is
fabricated using Selective Laser Melting (SLM) from 17-4 PH stainless
steel powder, and a thick-film (50–100 µm) Pb(Zr,Ti)O₃ (PZT) layer is
screen-printed on this substrate. The objective of this work is to show
the compatibility of various printing techniques, such as additive
manufacturing and screen printing, to design versatile energy
harvesters. The investigation is dedicated to the influence of a
cellular beam architecture on the electromechanical performance of
piezoelectric energy harvesters operating at low frequencies. The
harvester has an overall length of 80 mm and a width of 15 mm,
incorporating a 70 µm thick PZT layer sandwiched between two gold
electrodes. The reduced effective stiffness resulting from the
triangular cellular geometry enables operation at low resonant
frequencies. Without a tip mass, the maximum output power is obtained
at a resonant frequency of 60 Hz, yielding 8 µW after load resistance
optimization. When a 4 g tip mass is attached, the resonant frequency
decreases to 24 Hz and the maximum output power increases to 18 µW. A
finite element model is developed to predict the electromechanical
response of the cellular harvester. Comparison between numerical and
experimental results shows good agreement, with a maximum error of 15%
in the predicted output power. These results demonstrate the potential
of additively manufactured cellular beams combined with screen-printed
thick-film PZT for efficient low-frequency vibration energy harvesting
and validate the proposed modeling approach. |
| Ayoub DAHANI, Elie LEFEUVRE, Alejandro GODíNEZ PéREZ MEDINA, Muriel THOMASSET, Etienne HERTH, Alexis BRENES High-Resolution Resonant Silicon-On-Glass MEMS Electrostatic Sensor With Adjustable Sensitivity | In
this work, we propose a new design for a MEMS tilt sensor with
adjustable sensitivity. The proposed MEMS device is fabricated in
Silicon-On-Glass (SOG) technology. It is actuated by linear gap-overlap
combs and the resonant frequency is adjusted by another set of
triangular combs. The resulting resonator exhibits a short-circuit
resonant frequency of 63Hz and a quality factor around 9000 at 10^(-3)
mbar vacuum. A sensitivity of 0.610 mHz/° has been achieved at
130V bias voltage with a resolution of 0.04°. The sensitivity can be
tuned via the bias voltage up to the pull-in threshold, which is set a
trade-off between a wide measurement range and high sensitivity. |
| Gaelle LISSORGUES, Emy ROUSSEAUX, Asya ÇöLöGLU, Thuy NGUYEN, Nizar BEN MOUSSA, Lionel ROUSSEAU Comparative Analysis of Vibration Modes of Boron-Doped Diamond MEMS Membranes |
In
this work, we investigate the dynamic behavior of boron-doped diamond
(BDD) membranes for MEMS applications. Circular membranes with a radius
of approximately 500 μm and a thickness around 1.30 μm were fabricated
and characterized. The first two resonance modes were analyzed using
three complementary approaches: analytical calculation, finite element
simulation (COMSOL), and experimental measurement. Analytical
frequencies were obtained using the classical plate theory formula with
modal coefficients k₁ = 10.22 and k₂ = 21.26. The results show good
agreement between calculations, simulations, and experiments, with
clear distinctions between the first and second vibration modes. This
work provides a comprehensive understanding of the mode-dependent
behavior of BDD membranes and establishes a benchmark for their use in
high-frequency MEMS resonators. |
15:00 – 15:30 : Pause
15:30 – 16:30 : Thermal devices session
Chairperson: Gaëlle Lissorgues (ESIEE, Univ. G. Eiffel, France)
| khaled AHMAD, Baptiste BARADEL, Olivier LEON, Thibaut DUPUY, Philippe COMBETTE, Alain GIANI Reduction of Angular Sensitivity in Micro Hot-Wire Probes for Velocity Measurements |
The performance of previously developed micro hotwire (μHW) probes depends on the geometry of their support prongs, which can introduce orientation-dependent measurement errors known as angular sensitivity. This study investigates the influence of prong width on the angular sensitivity of μHW probes. Probes with prong widths of 200, 400, and 600 μm were fabricated using a microfabrication process optimized to preserve wire integrity. Experiments were conducted in a laminar jet over a velocity range of 1–20 m/s, with the probe rotated through pitch angles from -45° to +45°. Relative velocity deviations from a reference orientation were analyzed to quantify angular sensitivity. The results show that thinner prongs significantly reduce orientation-dependent errors, yielding maximum deviations below 4.5%, whereas wider prongs exhibit deviations of up to 8% at low velocities and large pitch angles. These findings provide quantitative guidelines for designing μHW probes with reduced angular dependence over a range of flow velocities. |
| Rodica-Cristina VOICU, Raluca MULLER, Oana BRINCOVEANU, Catalin PARVULESCU An electro-thermally actuated microgripper based silicon as structural material for micromanipulation |
Microgrippers are small MEMS devices considered to manipulate, grasp, pick-and-place or move objects at a micro- or nanoscale often used in micro-manipulation tasks, microassembly, microelectronics, nanotechnology and biomedical applications. In this paper, an electro-thermally actuated microgripper with in-plane motion is investigated in order to be fabricated using silicon as structural material and by surface micromachining processes. Design, numerically simulations, characterizations, and fabrication experimental tests were performed. Electro-thermo-mechanical FEM simulations were accomplished using Comsol Multiphysics software in order to analyze the performance of the microgripper device. A comparison of the microgripper performances for different thicknesses of the device silicon structural layer were taken into account and were presented. A low actuation voltage/current is obtained (less than 5V/250 mA), a high in-plane opening (more than 60 µm) and a very low out-of-plane displacements (less than 0.09 µm) is obtained. The intention of this paper is also to investigate the feasibility of silicon with low resistivity as structural material for microgrippers and as an inexpensive material to be used for MEMS fabrication with application in micromanipulation domains. |
| Ryugo SHIMAMURA, Shun YASUNAGA, Chen WANG, Michael KRAFT, Yoshio MITA Post-Process Latch-in Assembly of Symmetrically Bistable Beams via V-Shaped Thermal Actuators |
Pin-joint buckled beam as a symmetrically bistable microelement has required manual post-process latch-in operation because a long-stroke and strong compression is required, hindering its scalability. To address this challenge, we demonstrate the electrically driven assembly of symmetrically bistable MEMS pin-joint buckled beams. To realize large force for buckling and large displacement for latching, V-shaped electrothermal actuators are implemented. Using fabricated devices, latching requiring displacement of 12 μm and load of 53.1 μN was verified at 6.25V. The electrothermally assembled element demonstrated bistable operation, paving way to larger scale, standalone integration of bistable elements. |
Tuesday, June 2nd
8:30 – 9:00 Welcome
(No coffee!)
9:00 – 10:20 Piezoelectric MEMS session
Chairperson: Alexis Brenes (C2N, Univ. Paris Saclay, France)
| Mihael KATALENIC, Niko PLANTAK, Dinko OLETIC Setup for simultaneous measurement of mechanical and direct piezoelectrical response of mechanically excited ultrasonic resonant MEMS sensors |
Mechanical
displacement and piezoelectric response measurements of ultrasonic
resonant microelectromechanical sensors (MEMS) are very often conducted
separately, or indirectly by exciting the MEMS samples electrically,
and then interferometrically observing the displacements generated by
their reverse piezoelectric response. However, this approach poses
significant limits to interpretation of measurement results. In this
paper we present a novel measurement setup enabling simultaneous
experimental characterization of mechanical and direct piezoelectric
response of mechanically excited resonant MEMS sensors, conducted on
the identical silicon MEMS sample integrated on a printed circuit board
(PCB). Example measurements are shown on ultrasonic piezoelectric
resonant MEMS array devices operating in 140-790 kHz frequency range,
micro fabricated in PiezoMUMPs technological process. Results
demonstrate that the proposed setup is able to capture displacement
amplitudes down to 1.4 nm and piezoelectric electric charge down to 0.36 pC in frequency range up to 1 MHz. |
| Masato
GOTO, Kaito KAMIYA, Shun YASUNAGA, Hideharu AMANO, Atsutake KOSUGE,
Naonobu SHIMAMOTO, Tohru MOGAMI, Yukinori OCHIAI, Hirofumi SUMI, Yurie
INOUE, Makoto IKEDA, Yoshio MITA Driving PMUT with Processor-Controlled VCO Realized by Rapid Mixed-Signal Prototyping on Agile-X Platform | In
R&D and high-mix low-volume development of integrated MEMS, or when
process incompatibility of MEMS must be considered, monolithic
integration becomes difficult. In such cases, it is beneficial to
fabricate the MEMS device and the processor/signal-processing circuit
as separate chips and to evaluate them through close integration with
rapid iteration. In this paper, we propose to connect MEMS and control circuitry through a gate-array (GA)-based mixed-signal interface provided by the Agile-X platform, which enables short-turnaround system-on-a-chip (SoC) prototyping by one-layer mask-less patterning of wiring. To demonstrate its usability, we implemented a voltage-controlled oscillator (VCO) in the GA region with an external input of analog voltage to continuously tune the oscillation frequency. A software-defined waveform can be obtained by allowing the processor to input the enable signal of VCO. Finally, the generated signal was directly supplied to a piezoelectric micromachined ultrasonic transducer (PMUT) fabricated on a separate chip, and the vibration response was measured. These results show that the Agile-X platform provides a practical basis for rapidly iterating the prototyping of processor-controlled mixed-signal drive and control systems for close integration of MEMS devices. |
| Oguz Kaan ERDEN, Chris VAN HOOF, Xavier ROTTENBERG, Bogdan VYSOTSKYI Distance Sensing in Implant-Scale Acoustic Power Delivery Links Using Transmitter Input Impedance | Quantifying
the separation between a transmitter (Tx) and receiver (Rx)
piezoelectric micromachined ultrasonic transducer (pMUT) is useful for
alignment, calibration, and robust operation of implant-scale acoustic
power delivery links. Distance variations translate directly to large
changes in received power and efficiency; therefore, Tx-side awareness
of Tx–Rx separation and coupling state is valuable for safe and optimal
power delivery. In this work, we show that a compact frequency domain
link model can capture the Tx-Rx separation from Tx-side electrical
measurements alone. The Tx and Rx pMUTs are represented by mixed-domain
two-port parameters, and propagation is captured with a closed-form
mutual impedance, yielding a cascaded forward model that predicts the
Tx input response as a function of distance and frequency. Numerical
verification with COMSOL Multiphysics simulations, across
wavelength-normalized separations, shows that the proposed approach
captures the dominant distance dependent trends in the Tx-side input
response. We further show that single-frequency scalar readouts can
provide useful local separation information, while broadband complex
Tx-side signatures enable more reliable discrimination across broader
separation ranges. Building on this frequency-dependent behavior, we
demonstrate a reference-based relative ranging method using the phase
slope of a normalized broadband observable. Finally, we show that the
preferred drive frequency for delivered power shifts with separation,
highlighting the practical utility of Tx-side separation awareness for
separation-aware retuning. These results support transmitter-side
impedance back-action as a compact link-state observable for monitoring
and adaptive operation in implant-scale acoustic power links. |
| Kaito KAMIYA, Shun YASUNAGA, Ryosho NAKANE, Akio HIGO, Yoshio MITA Design and Fabrication of PMUT on Out-of-Plane-Rotation MicroStage for Wider Ultrasonic Beam Scanning Range | Non-invasive
and label-free ultrasonic beamforming technology has attracted
attention for manipulating biological samples without causing damage or
contamination. However, conventional methods employing planar
piezoelectric micromachined ultrasonic transducer (PMUT) arrays face
the challenge of limited practical scanning angles due to the
generation of grating lobes. To overcome this limitation, this paper
proposes to integrate a PMUT with an out-of-plane-rotation microstage,
enabling the PMUT element itself to be physically tilted. Through
characterization using a vibration analyzer, we succeeded in the
independent and simultaneous driving of the PMUT with a resonance
frequency of 183.880 kHz and the torsional stage with a resonance
frequency of 20.062 kHz. The fabricated device demonstrated physical
steering of the ultrasonic element via a tilting motion of up to ±
0.282˚. Furthermore, theoretical calculations based on the measured
velocity distribution estimated an acoustic pressure generation of
approximately 110 dB at a distance of 10 mm from a single element.
These achievements serve as a foundational electromechanical element
toward realizing a three-dimensional non-contact manipulation system
with a wide scanning angle and high output through future PMUT array
implementations. |
10:20 – 11:00 : Pause: coffee break
11:00 – 12:00 : MOEMS Session
Chairperson: Peter Schneider (Fraunhofer IIS, Germany)
| xu LI, Xuming ZHANG, Zhongjian TAN, Heng JIANG, Liang WAN A Low-Voltage Electromagnetically Actuated Tunable Microlens Array for Fast Focal-Stack Light-Field Imaging |
Artificial
Compound Eyes (ACEs) offer unique advantages such as wide field of view
(FOV), fast dynamic response, and infinite depth of field, making them
promising for scenarios including UAV navigation, robot vision, and
security surveillance. However, practical panoramic imaging with ACEs
is hindered by inherent limitations of microlens array imaging,
including low resolution of single-view sub-images, challenges in
distortion correction, poor stitching quality due to inappropriate
interpolation, and coverage of peripheral lens images caused by
unbalanced weights in Perspective-n-Point (PnP) stitching. To address
these issues, this paper proposes an optimized PnP-based stitching
algorithm for ACE panoramic imaging. The algorithm first explores
independent calibration of internal parameters and distortion
coefficients for each microlens, verifying the theoretical feasibility
of distortion correction; then enhances sub-image resolution via a
physics-enhanced super-resolution network. For the PnP interpolation
step, a local grid interpolation method with cross-lens correspondence
constraints is adopted to avoid pixel aggregation. Finally, a dynamic
weight fusion strategy based on overlapping/non-overlapping regions is
designed to eliminate the coverage of peripheral lens images.
Experimental results demonstrate that the proposed algorithm
effectively resolves core issues of traditional PnP stitching for ACEs,
achieving significant progress in panoramic reconstruction with
improved spatial uniformity and detail retention. The theoretical
exploration of distortion correction provides a solid foundation for
subsequent technical optimization. |
| Yves
EMERY, Jérôme PARENT, Nicolas PAVILLON, Eduardo SOLANAS, François
MENDELS, Jean-Marc COLAGROSSI, Louis JAUGEY, Tristan COLOMB, Etienne
CUCHE Characterization of Floor Noise of Vibration Amplitude Maps for Digital Holography Microscopy |
Digital
holographic microscopy (DHM) is a powerful tool for the study of
micro-electromechanical systems (MEMS) thanks to its one-shot
full-field capability. This technology however provides data that is
different from other measurement approaches in the field such as Laser
Doppler Vibrometry (LDV), making it difficult to compare them
quantitatively. We propose a new methodology to characterize DHM in the context of vibration studies and define its detection limit. We quantitatively evaluate the influence of relevant experimental parameters to demonstrate the effective Floor Noise (FN) of DHM technology and provide guidelines to help the user set them up to reach the desired resolution, down to picometer range. |
| Ryota KOBAYASHI, Shun YASUNAGA, Ryosho NAKANE, Akio HIGO, Yoshio MITA Electrically Controllable Bistable Microactuator Enabled by Triangular Comb Array Note: Title publication was delayed to June 2nd, 2026 |
This paper presents the design, fabrication, and characterization of a bistable microelectromechanical device capable of state transitions with a highly controllable, low snapping force. This precise control is achieved using the triangular comb array (TCA) with varying finger lengths. By adjusting the applied DC voltage, the electrostatic negative stiffness is dynamically modulated, allowing the net stiffness of the system to be tuned to a small negative value, thereby minimizing the required snapping force. To accurately predict the nonlinear force-displacement relationship, we apply the Schwarz-Christoffel transformation to model the exact electric field distribution, thereby capturing fringe effects that are typically neglected by simple parallel-plate models. The device is successfully fabricated using the standard silicon-on-insulator MEMS process. We experimentally evaluate both the DC force-displacement characteristics and the AC resonance shifts induced by the reduction in the effective spring constant. The experimental results demonstrate excellent agreement with our theoretical calculations. Notably, by accurately capturing fringe effects, our model successfully predicts complex dynamic behaviors, including the emergence of tristable states at specific applied voltages. These findings verify the reliable operation of the proposed bistable mechanism and pave the way for advanced multi-stable applications through optimized electrode geometry and voltage. |
12:00 – 14:00 : Lunch pause
14:00 – 15:00 : Sponsor slot
15:00 – 15:20 : Pause
15:40 – 17:30 : poster session
5 min presentation + poster exhibition and discussions
Chairperson: Alain Bosseboeuf (CNRS, France)
|
Poster session Tuesday 2nd |
||
| Malak BIGOURD, Cyril SZOPA, Lylia SKANDER, Gabin BERGEROT, David COSCIA, Fréderic FERREIRA, Guillaume RIOLAND, Arnaud BUCH, Valérie PEULON, Pascal CARDINAEL | Development and integration of lab-on-chip Micro Electro Mechanical Systems (MEMS) into an ultra-miniaturised gas chromatograph prototype for planetary studies. | |
| Theresa JACHMANN, Jan MEHNER | On the implementation of wavelets for electrostatic BEM | |
| J.J. ROUSSEAU, Podda Abouna MARIAM, Antoine DEUBAIBE, J.P. CHATELON, stephane CAPRARO, D. PIETROY | Electrolytic copper vias for integrated solenoid inductors with large core region | |
| Alina CISMARU, Emanuela PROIETTI, Romolo MARCELLI | Design of an RF MEMS Switched Metamaterial Patch Antenna for Sensing Applications | |
| Priyanka DEWANGAN, Vishal SAHU, swarnaltha VEERLA, Prem PAL | Etching characteristics of Si{100} wafer in very low- concentration NH4OH | |
| Sébastien LAVIELLE, Emile MARTINCIC, Bruno LE PIOUFLE, Sakina BENSALEM | Electrodeformation for the estimation of mechanical properties in microalgae | |
| Essey HABTESLASSIE, Ibrahim ELFADEL | Comparative Study of Two Additive Manufacturing Methods for Pressure Sensor Integration in Footwear Wearables | |
| Charlotte NEEL, Sébastien LAVIELLE, Mariana MORAN-FERNANDEZ, Myriam TAVERNA, Bruno LE PIOUFLE, Sameh OBEID, Sakina BENSALEM | Dielectrophoresis-based study for the characterization of extracellular vesicles using a biochip | |
| Noriko KAWAI, Akihiko YOSHIDA, Ayako MIZUSHIMA, Yurie INOUE, Shinji TSUBOI, Shun YASUNAGA, Etsuko OHTA, David BOURRIER, Amel BEGHERSA, Hugues GRANIER, Yoshio MITA | Optimal Top Protection Layer Creation in "Hat-and- Skirt" High Aspect Ratio Nano Structure | |
| Pierre AVERSENG, Shun YASUNAGA, Ryosho NAKANE, Yoshio MITA | Electrical Readout of Symmetrically Bistable MEMS Mechanical Memory using Doped Silicon Springs | |
| Lyraie RAKOTONDRATSIMBA, Jerome JUILLARD, Michael BAHRIZ, BRENES ALEXIS, Alain BOSSEBOEUF | Design of a MEMS-based photoacoustic pressure sensor – Membrane design | |
19:30 – 23:00 : Social event
Dinner on the Canal Saint Martin, by Canauxrama (to be updated)
Wednesday, June 3rd
8:30 – 9:00 Welcome
and coffee
9:00 – 10:20 MEMS session
Chairperson: Hélène Debeda (Univ. Bordeaux, France)
| dai QINGLIN, wenjie LV, zhang YUJIE, junzhe YUAN, fang YE, liu JIYAO, qiang SHEN Explicit Measurement-Decoupled Bias-State Dual Estimators for a Four-Gyroscope Array with 9.8-Fold Bias-Stability Enhancement |
To
maintain the accuracy of micro-electro-mechanical system (MEMS)
gyroscopes is an important challenge under complex environmental
disturbances. In this work, explicit measurement-decoupled bias–state
(MDBS) dual estimators are presented by constructing a
linear-combination pseudo-measurement that eliminates the state term in
the measurement equation for decoupled bias–state estimation.
Because a single gyro lacks sufficient degrees of freedom for
linear-combination-based decoupling, a co-axial integrated
four-gyroscope array is employed to increase measurement dimensionality
and structural redundancy, enabling explicit decoupling. Under complex
disturbance conditions, experimental tests of the four-gyroscope array
show that the root mean square error (RMSE) reaches 0.21°/s, which is
improved by 6.9 times, 4.4 times, and 3.3 times compared with the
Kalman filter (KF), the single unknown disturbance (SUD) estimator, and
the particle filter (PF), respectively. Moreover, the bias stability of
the array-based gyroscope under environmental disturbances has a
notable enhancement of 9.8 times compared with the raw output of a
single gyroscope. |
| Koshi MATSUZAWA, Shun YASUNAGA, Ryosho NAKANE, Akio HIGO, Yoshio MITA A Zero-Standby-Power Fine-Step Multistable MEMS Positioner | We propose a zero-standby-power, fine-step multistable MEMS positioner that combines a buckling-based bistable structure with movable stoppers. Stable positions are determined by the height of protrusions on the movable stoppers rather than a periodic pitch, enabling higher resolution than traditional mechanical latches. The device, fabricated on a 15 µm-thick SOI wafer, demonstrated six discrete stable states with a 1.4 µm step size and a minimum positioning error of 30 nm. Durability tests over 10,000 cycles revealed a 30 nm ``run-in" shift, followed by stable operation with a maximum error of 150 nm. Furthermore, scaling analysis confirmed that the bistable characteristics are independent of the device layer thickness, ensuring feasibility for future integration into the standard 220 nm silicon photonics platform. This technology provides a scalable, zero-power building block for the next generation of programmable optical networks. |
| Tomoya SAMPEI, Satoshi KOMATSU A Single-Structure Three-Axis CMOS-MEMS Accelerometer Using a Standard 0.18 µm CMOS Process |
In
this study, we designed a single-structure three-axis CMOS-MEMS
accelerometer using a standard 0.18 μm CMOS process and a post-CMOS
process consisting of anisotropic oxide etching and isotropic silicon
etching. This process is compatible with standard CMOS processes and
can be applied to other standard CMOS processes and integrated with
circuits. In addition, cross-axis sensitivity is reduced also through
structural design. This structure enables the compact implementation of
a three-axis accelerometer using a single structure. The simulation
results showed sensitivities of 0.360 fF/G for the X-axis, 0.403 fF/G
for the Y-axis, and 0.557 fF/G for the Z-axis. Future work includes
structural optimization, experimental verification through fabrication
and measurement, and integration with a CMOS readout circuit. |
| Yoshio MITA, Noriko KAWAI, Masato
GOTO, Ayako MIZUSHIMA, Kei MISUMI, Tomoya NAKAMURA, Shun YASUNAGA,
Yurie INOUE, Shinji TSUBOI, Akihiko YOSHIDA, Etsuko OHTA, Ryosho
NAKANE, Akio HIGO, Atsutake KOSUGE, Hideharu AMANO, Hirofumi SUMI,
Tohru MOGAMI, Yukinori OCHIAI, Makoto IKEDA, Naonobu SHIMAMOTO "Flipchip-to-Measure" 160-pins Batch Wiring for Quick and Reliable Agile-X VLSI Packaging | towards the democratization of VLSI design and integrated systems research and education, the authors develop a very short turn-around-time design to chip fabrication scheme. Due to the structured ASIC that we prepared functional LSIs is fabricated only by one or a couple of layers of routing processes to connect prefabricated transistors and IP blocks (e.g. RISC-V CPU). The last “missing piece” is packaging. One-by-one wire bonding of many pins (160 pins) remains tricky in university open platform, where only manual wire bonder is available in general. In this contribution, we propose a new concept that enables reliable and quick batch wiring: A packaged and wirebonded interposer with gold bumps is prepared in advance, and all the I/O pins are batch connected at once by flip-chip bonding of the LSI with gold bumps. Both the lead time (if we outsource wire bonding takes one week) as well as wire bonding failure (if we do it by ourselves) are thereby drastically reduced. |
10:20 – 10:50 :
Pause
10:50 – 12:10 Microfluidic/health devices session
Chairperson: Yoshio Mita (Univ. Tokyo, Japan)
| Hana BOUKHAROUBA, Gilgueng HWANG, Stephane SERFATY, Pierre-Yves JOUBERT Contactless dielectric characterization of biomimetic fluids using a passive RF resonator associated to a microfluidic chip | This
paper presents the integration of a wireless three-frequency monolithic
resonator (WMFR-3) as a passive, inductive, and contactless sensor for
the remote monitoring of dielectric variations in bio-mimicking saline
solutions flowing within a microfluidic chip designed for cell culture.
The WMFR-3 consists of three split-ring resonators with diameters
ranging from 1.4 to 3.4 cm, operating in the 80–350 MHz frequency band,
selected for their relevance to the characterization of biological
media. The microfluidic platform incorporates a 1.3 cm diameter culture
chamber connected to microchannel networks ensuring a controlled and
homogeneous flow compatible with tissue integrity. Experimental results demonstrate that the proposed sensor enables non-invasive monitoring of conductivity variations in the tested solutions, exhibiting a quasi-linear response with sensitivities ranging from 3.45 to 53.5 mΩ/(S/m), depending on the operating frequency. These findings highlight the potential of the WMFR-3 as a low-cost, easily integrable solution for multiparametric dielectric sensing, even for small sample volumes relative to the sensor dimensions. This work paves the way toward non-invasive and enhanced dielectric characterization of biological media in instrumented microfluidic systems. |
| Sandipta SENAPATI, Kunal Kumar CHAUDHARY, Saakshi DHANEKAR Design Optimization and Experimental Validation of MEMS Micro-GC Column for Binary Gas Separation | In
this work, the design and performance of MEMS micro-Gas Chromatography
(µGC) columns are investigated using numerical COMSOL simulations and
experimental demonstration. Straight capillary columns and serpentine
micro-GC columns with circular and trapezoidal cross-sections are
designed using COMSOL Multiphysics 6.3. The influence of key design
parameters including channel length, stationary phase coating
thickness, and internal diameter on separation performance is
systematically evaluated for a polar binary mixture of acetone and
ethanol using nitrogen as the carrier gas and polyethylene glycol (PEG)
as the stationary phase. Simulation results show that straight
capillary columns with 100 cm fail to achieve effective separation,
whereas serpentine micro columns with 100 cm significantly improve
resolution due to increased interaction length and compact geometry.
The optimized circular serpentine micro GC column demonstrates higher
column efficiency and separation time of 45.6 % and 73 sec respectively
in comparison to trapezoidal cross-section based GC columns.
Additionally, fabrication of circular and trapezoidal micro-GC columns
on p-type silicon wafers is demonstrated using wet chemical etching
technique and a packaged PDMS μ-GC column connected to a sensor setup
is also shown. The results provide design guidelines for compact
MEMS-based micro-GC systems for the separation of polar VOCs. |
| Yiqi SHEN, Ruiqi GONG, Runlin NIE, Tieying XU Development and Experimental Validation of a Biomimetic Capillary Network Chip for Microcirculatory Disease Research |
This
study focuses on addressing the challenge of pathological mechanisms in
microvascular-related diseases such as sickle cell anemia (SCA). SCA
causes red blood cells to deform into rigid, adhesive "sickle" shapes
under hypoxic conditions, leading to microvascular occlusion and
multi-organ damage. Traditional research methods, including animal
models and Transwell systems, suffer from limitations such as poor
dynamic simulation, lack of real-time observation, and significant
interspecies differences, which hinder the exploration of
microcirculatory pathophysiology. To overcome these challenges, this
research innovatively employs microfluidic technology to develop a
biomimetic capillary network chip. The chip precisely replicates the microstructure and dynamic fluid environment of human capillaries through a hierarchical contracting channel design (key channel dimensions of 10 μm to mimic erythrocyte size) and COMSOL-simulated fluid shear stress optimization. Fabricated using biocompatible polydimethylsiloxane (PDMS), the chip enables high-resolution microscopic observation of cell behavior. Preliminary experiments demonstrated successful perfusion of PBS-based microsphere suspensions, visually validating the platform’s capability to simulate red blood cell dynamics and microvascular occlusion processes. While current limitations include channel clogging at narrow diameters and bubble retention in complex structures, the chip establishes a foundation for future integration of real biological samples (e.g., yeast cells or standardized cell lines), drug screening, and personalized medicine research. This work holds significant promise for advancing the understanding of hemopathies and developing targeted therapeutic strategies. |
| Zsombor SZOMOR, Szabó ZOLTáN, Péter FüRJES High-Throughput Real Time NIR Optical Screening of Droplet-Based Microfluidic Microreactors |
Droplet-based
microfluidic systems offer isolated microenvironments well suited for
parallel bioanalytical and physicochemical studies, but their reliable
operation requires precise, real-time control of droplet properties. In
this paper, an integrated optofluidic platform is presented for
high-throughput droplet generation and in-situ optical
characterization. The system combines optimized flow-focusing
geometries, mechanically stable 3D-printed fixtures, and a low-cost
near-infrared (NIR) optical sensing module operating at 1450 nm,
providing strong absorption contrast between aqueous droplets and the
oil continuous phase. Time-resolved absorption signals are used to
extract droplet diameter and generation frequency in real time, without
high-speed imaging or extensive post-processing. The approach enables
reliable, long-term droplet monitoring and establishes a robust
foundation for future temperature-controlled droplet microfluidic
applications requiring accurate knowledge of droplet size, residence
time, and flow stability. |
| Min ZHU, Tianyi ZHANG, Huancheng ZHANG, Tieying XU Optimization of Micro-Nanofabrication Methods for Microfluidic Chip Vascularization Dedicated to Lung Cancer Cell Monitoring |
Tumor
metastasis remains the leading cause of cancer
mortality, necessitating advanced in vitro models to
elucidate its complex mechanisms. Specifically, constructing
highly biomimetic microfluidic vascular networks is essential for the
high-resolution optical monitoring of the metastatic cascade of
circulating tumor cells (CTCs), such as lung cancer cells. However,
current fabrication techniques struggle to balance geometric fidelity
with detection accuracy. Traditional photolithography yields
rectangular cross-sections that induce flow dead zones and abnormal
shear stress gradients. While backside lithography achieves the batch
production of semi-circular channels, it struggles to faithfully
reproduce the intricate geometric details at complex bifurcations.
These artifacts severely compromise the reliability of optical
monitoring.To address these challenges, this study focuses on
systematically optimizing micro-nanofabrication methods for
microvascular chips, aiming to provide a standardized platform for
monitoring lung cancer cell behaviors. We compared traditional
photolithography, backside lithography, and Two-Photon Polymerization
(TPP) 3D printing. While backside lithography offers advantages in
cost-effective batch production, TPP was identified as the optimal
strategy for the high-fidelity reconstruction of branching networks and
precise control over cross-sectional geometry. Utilizing TPP, we
constructed a biomimetic "inverted U-shaped" bifurcating network
governed by Murray's law. This innovative architecture—combining a flat
bottom, vertical sidewalls, and a rounded top—physically eliminates
corner dead zones and marginal cell trapping.Dynamic perfusion
experiments confirmed that endothelial cells exhibit uniform adhesion
and stable growth within the microchannels. By innovating the
micro-nanofabrication strategy, this study not only provides a
reliable, standardized platform for the precise quantification of lung
cancer cell adhesion and trans-endothelial migration but also offers a
high-value paradigm for future anti-metastasis drug screening and the
development of patient-specific diagnostic and therapeutic strategies. |
12:00 – 12:15 Closing
session
12:15 – 14:00 Lunch
14:00 – 15:00 Commitees meeting
15:00 – 17:00 Round table - joint workshop DTIP / Univ. Tokyo / Univ. Paris-Saclay
15:00-15:20 Introduction of Projet "MONDIAL" by JST ASPIRE - Prof. Yoshio Mita, UTokyo Electrical Engineering
15:20-15:35 Collaborative seeds Presentation of Arai - Sugiura Group, Dr. Hirotaka Sugiura, UTokyo Mechanical Engineering
15:35-15:50 Collaborative seeds Presentation of Kuboki, Dr. Takeshi Kuboki, Hiroshima University
15:50-16:05 Collaborative Seeds Presentation of ENS Paris-Saclay, Sakina Bensalem, ENS Paris-Saclay
16:05-16:20 Collaborative Seeds Presentation of C2N, Emile Martincic, C2N, Univ. Paris-Saclay
16:20-16:30 Living Report from Japan to Europe, Mr Ryugo Shimamura, UTokyo Mita Group
16:30-16:40 Living Report from Europe to Japan (TBC), Mr Pierre Aversang, Ecole Centrale Lyon
16:40-17:00 Panel - Advantages and Challenges in Multidisciplinary Open Nanotechnology Device Development
